Microelectronics Lab
Note: The Microelectronics lab has a new web address:
http://www.micro.uiuc.edu/
Please follow the link above for the current Micro homepage,
and update your links to reflect the changes.
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A jewel in the University of Illinois
crown, the Microelectronics Laboratory is one of the finest university
based semiconductor research facilities in the United States. The state
of Illinois, University, industrial partners, and federal agencies such
as the National Science Foundation
and the Department of
Defense, have invested more than $80 million in the Laboratory and
its facilities. Research in the lab is conducted under the auspices of
the Center for Compund
Semiconductor Microelectronics (CCSM).
CCSM Researchers are investigating the materials, devices,
circuits, and systems required for the information age. The CCSM's
vertically integrated research program is organized into four topical
areas:
Research projects impact a range
of product areas such as lightwave communications, high speed data
processing, wireless communications, bioanalytical systems, miniaturized
heating and cooling, and environmental sensing.
CCSM faculty have pioneered developments in device concepts,
growth techniques, and processing technologies, including:
- stable native oxides in III-V semiconductors for
vertical-cavity-surface-emitting lasers (VCSELS) and LEDs.
- strained-layer quantum well lasers with high reliability,
low-threshold currents, ultra-narrow linewidths, tunable wavelength, and
integrated modulators.
- selective area epitaxial growth for lightwave communications
lasers.
- high density carbon doping for improved heterojunction bipolar
transistors.
- low dark current Schottky diode photodetectors with transparent
contacts.
- GaAs MESFET and pseudomorphic III-V heterostructure device
processing for high speed integrated circuits.
- CAD tools for MEMS.
- MEMS technology for biochemical analysis.
The 50,000 square foot Laboratory houses state of the art facilities for
atomic-scale epitaxial growth of III-V
semiconductor crystals, high resolution optical and e-beam lithography, processing, and fabrication
of microelectronic and optoelectronic devices and MEMS in 8,000 square
feet of clean room space. Additional general purpose laboratories enable
researchers to conduct materials characterization and ultra-high speed optical and electrical testing
of microelectronic and optoelectronic devices and integrated circuits.
The Lab was the first university based facility in the world built in
accordance with the H6 fire and safety codes applicable to semiconductor
labs.
Information
Research Groups
UIUC Sites
Other Places to Visit
University of Illinois at Urbana-Champaign
127 Microelectronics Lab
208 N. Wright Street
Urbana, IL 61801
Phone: (217) 333-3097
Fax: (217) 244-6375
Dr. Stephen Bishop, director